Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers ZYGO is the technology and application support leader in heterodyne displacement interferometry, offering comple ...
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Semiconductor Systems ZYGO's semiconductor metrology systems enable manufacturers to improve the quality and yield of their processes, while lowering metrology costs. Metrology Systems APM650™ – Th ...
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Absolute Position Measurement System The ZPS™ system provides high-precision non-contact absolute position measurement on up to 64 synchronized channels ZYGO's new ZPS™ system measures ...
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Laser Interferometers Laser interferometers from ZYGO were first introduced commercially over 35 years ago. Today, ZYGO continues to maintain the leadership role in surface form metrology using laser ...
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3D Optical Surface Profilers Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profil ...
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