3D Optical Surface Profilers – PTSC
3D Optical Surface Profilers
Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application’s requirements, including precision, speed, automation, configuration flexibility, and vertical range.
Specialty Models
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO’s Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.
Profiler Objectives
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.
Optical profiler objectives, mounted on a turret
ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.
